Papers - TAMECHIKA Emi
about 56-
A reliable aptamer array prepared by repeating inkjet-spotting toward on-site measurement
Inoue Suzuyo, Seyama Michiko, Miura Toru, Horiuchi Tsutomu, Iwasaki Yuzuru, Takahashi Jun-ichi, Hay … Show more authors
Inoue Suzuyo, Seyama Michiko, Miura Toru, Horiuchi Tsutomu, Iwasaki Yuzuru, Takahashi Jun-ichi, Hayashi Katsuyoshi, Tamechika Emi Hide authors
BIOSENSORS & BIOELECTRONICS 85 943 - 949 2016.11
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Panel Discussion
Tamechika Emi, Iga Kenichi, Takai Madoka, Nakajima Hiroshi, Nemoto Kae
JSAP Annual Meetings Extended Abstracts 2016.1 ( 0 ) 34 - 34 2016.3
Language：Japanese Publishing type：Research paper (scientific journal) Publisher：The Japan Society of Applied Physics Joint Work
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The Purpose of This Special Feature
HATANO Mutsuko, KAWARADA Hiroshi, TAMECHIKA Emi, MORI Yusuke
TRENDS IN THE SCIENCES 21 ( 12 ) 12_63 - 12_63 2016
Language：English Publishing type：Research paper (scientific journal) Publisher：Japan Science Support Foundation Joint Work
Other Link： https://ci.nii.ac.jp/naid/130005558116
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Polymer brush biointerfaces for highly sensitive biosensors that preserve the structure and function of immobilized proteins
Takasu Kenji, Kushiro Keiichiro, Hayashi Katsuyoshi, Iwasaki Yuzuru, Inoue Suzuyo, Tamechika Emi, T … Show more authors
Takasu Kenji, Kushiro Keiichiro, Hayashi Katsuyoshi, Iwasaki Yuzuru, Inoue Suzuyo, Tamechika Emi, Takai Madoka Hide authors
SENSORS AND ACTUATORS B-CHEMICAL 216 428 - 433 2015.9
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Recent Activities for the Promotion of Gender Equality in the Societies of Physics in Japan
Mori H., Sasao M., Nemoto K., Tamechika E., Watanabe M. O.
WOMEN IN PHYSICS: 5TH IUPAP INTERNATIONAL CONFERENCE ON WOMEN IN PHYSICS 1697 2015
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Air-band optical resonators in one-dimensional Si photonic crystal waveguides for biosensing applications
Hirai Kakuro, Araki Takahiro, Cai Jingnan, Hayashi Katsuyoshi, Horiuchi Tsutomu, Iwasaki Yuzuru, Ue … Show more authors
Hirai Kakuro, Araki Takahiro, Cai Jingnan, Hayashi Katsuyoshi, Horiuchi Tsutomu, Iwasaki Yuzuru, Ueno Yuko, Tamechika Emi, Wada Kazumi, Ishikawa Yasuhiko Hide authors
JAPANESE JOURNAL OF APPLIED PHYSICS 53 ( 4 ) 2014.4
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Simulation tool for the prediction of compound dependence of CW-photoacoustic-based sensor using dual optical excitation
Camou S., Tamechika E.
SENSORS AND ACTUATORS B-CHEMICAL 189 224 - 229 2013.12
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Isothermic determination of aqueous solution glucose concentration in low mg/dL range by CW-photoacoustic-based protocol
Camou S., Ueno Y., Tamechika E.
SENSORS AND ACTUATORS B-CHEMICAL 185 568 - 574 2013.8
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Noninvasive and Continuous in vivo Monitoring of Physiological Parameter Variations Based on CW-Photoacoustic Protocol: Application to Body Temperature Measurements
Camou Serge, Tamechika Emi
応用物理学会学術講演会講演予稿集 2013.1 ( 0 ) 616 - 616 2013.3
Language：English Publishing type：Research paper (scientific journal) Publisher：公益社団法人 応用物理学会 Joint Work
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オンチップ構造を用いた酸化グラフェンアプタセンサの性能評価
古川 一暁, 上野 祐子, 松尾 光太, 井上 鈴代, 林 勝義, 為近 恵美, 日比野 浩樹
応用物理学会学術講演会講演予稿集 2013.1 ( 0 ) 2286 - 2286 2013.3
Language：Japanese Publishing type：Research paper (scientific journal) Publisher：公益社団法人 応用物理学会 Joint Work
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エアバンド光共振器を有するシリコンフォトニック結晶バイオセンサ
平井 格郎, 荒木 貴裕, 蔡 靖楠, 和田 一実, 石川 靖彦, 林 勝義, 堀内 勉, 岩崎 弦, 上野 祐子, 為近 恵美
応用物理学会学術講演会講演予稿集 2013.1 ( 0 ) 1092 - 1092 2013.3
Language：Japanese Publishing type：Research paper (scientific journal) Publisher：公益社団法人 応用物理学会 Joint Work
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Graphene-modified Interdigitated Array Electrode: Fabrication, Characterization, and Electrochemical Immunoassay Application
Ueno Yuko, Furukawa Kazuaki, Hayashi Katsuyoshi, Takamura Makoto, Hibino Hiroki, Tamechika Emi
ANALYTICAL SCIENCES 29 ( 1 ) 55 - 60 2013.1
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Effects of Sensing Layer Thickness on Biosensing Using Partially-Slotted Si Photonic Crystal Waveguides
Araki Takahiro, Hirai Kakuro, Cai Jingnan, Ishikawa Yasuhiko, Wada Kazumi, Hayashi Katsuyoshi, Hori … Show more authors
Araki Takahiro, Hirai Kakuro, Cai Jingnan, Ishikawa Yasuhiko, Wada Kazumi, Hayashi Katsuyoshi, Horiuchi Tsutomu, Iwasaki Yuzuru, Ueno Yuko, Tamechika Emi Hide authors
2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR) 2013
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Protein recognition on a single graphene oxide surface fixed on a solid support
Furukawa Kazuaki, Ueno Yuko, Tamechika Emi, Hibino Hiroki
JOURNAL OF MATERIALS CHEMISTRY B 1 ( 8 ) 1119 - 1124 2013
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Cooperative Suction by Vertical Capillary Array Pump for Controlling Flow Profiles of Microfluidic Sensor Chips
Horiuchi Tsutomu, Hayashi Katsuyoshi, Seyama Michiko, Inoue Suzuyo, Tamechika Emi
SENSORS 12 ( 10 ) 14053 - 14067 2012.10
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Floating Chip Mounting System Driven by Repulsive Force of Permanent Magnets for Multiple On-Site SPR Immunoassay Measurements
Horiuchi Tsutomu, Tobita Tatsuya, Miura Toru, Iwasaki Yuzuru, Seyama Michiko, Inoue Suzuyo, Takahas … Show more authors
Horiuchi Tsutomu, Tobita Tatsuya, Miura Toru, Iwasaki Yuzuru, Seyama Michiko, Inoue Suzuyo, Takahashi Jun-ichi, Haga Tsuneyuki, Tamechika Emi Hide authors
SENSORS 12 ( 10 ) 13964 - 13984 2012.10
Language：English Publishing type：Research paper (scientific journal) Joint Work
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アプタマ修飾した酸化グラフェンを用いた新規タンパク質検出法の提案と実証
古川 一暁, 上野 祐子, 為近 恵美, 日比野 浩樹
応用物理学会学術講演会講演予稿集 2012.2 ( 0 ) 2494 - 2494 2012.8
Language：Japanese Publishing type：Research paper (scientific journal) Publisher：公益社団法人 応用物理学会 Joint Work
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部分スロット共振器を有する一次元シリコンフォトニック結晶光導波路のバイオセンシング応用
荒木 貴裕, 石川 靖彦, 和田 一実, 林 勝義, 堀内 勉, 岩崎 弦, 為近 恵美
応用物理学会学術講演会講演予稿集 2012.2 ( 0 ) 1116 - 1116 2012.8
Language：Japanese Publishing type：Research paper (scientific journal) Publisher：公益社団法人 応用物理学会 Joint Work
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表面プラズモン共鳴による流速測定法を用いた血液凝固検査(APTT)方法の検討
井上 鈴代, 林 勝義, 瀬山 倫子, 岩崎 弦, 堀内 勉, 為近 恵美
応用物理学会学術講演会講演予稿集 2012.2 ( 0 ) 2338 - 2338 2012.8
Language：Japanese Publishing type：Research paper (scientific journal) Publisher：公益社団法人 応用物理学会 Joint Work
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Detection of Aqueous Glucose Based on a Cavity Size- and Optical-Wavelength-Independent Continuous-Wave Photoacoustic Technique
Camou S., Haga T., Tajima T., Tamechika E.
ANALYTICAL CHEMISTRY 84 ( 11 ) 4718 - 4724 2012.6
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Passive Fluidic Chip Composed of Integrated Vertical Capillary Tubes Developed for On-Site SPR Immunoassay Analysis Targeting Real Samples
Horiuchi Tsutomu, Miura Toru, Iwasaki Yuzuru, Seyama Michiko, Inoue Suzuyo, Takahashi Jun-ichi, Hag … Show more authors
Horiuchi Tsutomu, Miura Toru, Iwasaki Yuzuru, Seyama Michiko, Inoue Suzuyo, Takahashi Jun-ichi, Haga Tsuneyuki, Tamechika Emi Hide authors
SENSORS 12 ( 6 ) 7095 - 7108 2012.6
Language：English Publishing type：Research paper (scientific journal) Joint Work
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ＣＷ-光音響法によりグルコースの水溶液サンプルの非侵襲で連続モニタリングの測定法
上野 裕子, 為近 恵美
応用物理学会学術講演会講演予稿集 2012.1 ( 0 ) 662 - 662 2012.2
Language：Japanese Publishing type：Research paper (scientific journal) Publisher：公益社団法人 応用物理学会 Joint Work
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Portable Sensor for Determining Benzene Concentration from Airborne/liquid Samples with High Accuracy
Camou Serge, Tamechika Emi, Horiuchi Tsutomu
NTT Technical Review 10 ( 2 ) 38 - 44 2012.2
Language：The in addition, foreign language Publishing type：Research paper (scientific journal) Publisher：NTT先端技術総合研究所 Joint Work
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Terahertz Chemical Imaging of a Multicomponent Tablet in Pharmaceutical Applications
Ajito Katsuhiro, Ueno Yuko, Song Ho-Jin, Kim Jae-Young, Tamechika Emi, Kukutsu Naoya, Limwikrant Wa … Show more authors
Ajito Katsuhiro, Ueno Yuko, Song Ho-Jin, Kim Jae-Young, Tamechika Emi, Kukutsu Naoya, Limwikrant Waree, Yamamoto Keiji, Moribe Kunikazu Hide authors
CHEMICAL SENSORS 10 -AND- MEMS/NEMS 10 50 ( 12 ) 109 - 116 2012
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Simulation Tool for the Prediction of Compound Dependence of CW-Photoacoustic-based Sensor using Dual Differential Optical Excitation
Camou S., Ueno Y., Tamechika E.
26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012 47 474 - 477 2012
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Noninvasive and Continuous Measurement of Body Temperature Variations Based on CW-PA Protocol
Camou S., Ueno Y., Tamechika E.
2012 IEEE SENSORS PROCEEDINGS 797 - 800 2012
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Near-Infrared Photoluminescence Spectral Imaging of Chemically Oxidized Graphene Flakes
Ueno Yuko, Tamechika Emi, Furukawa Kazuaki, Suzuki Satoru, Hibino Hiroki
e-Journal of Surface Science and Nanotechnology 10 ( 0 ) 513 - 517 2012
Language：English Publishing type：Research paper (scientific journal) Publisher：公益社団法人 日本表面科学会 Joint Work
In order to determine the local structure of carbon <i>sp</i><sup>2</sup> clusters in chemically modified graphene oxide (GO) flakes, their luminescence was analyzed, using near-infrared photoluminescence (NIR PL) spectral imaging. GO flakes emit a broad PL spectrum of wavelengths of 800 to 1400 nm, indicating that they contain <i>sp</i><sup>2</sup> clusters, whose size is theoretically estimated to be in the 1.3 to 2.3 nm region. The size distribution of such <i>sp</i><sup>2</sup> clusters is fairly uniform at different positions and for different numbers of layers of GO, at the spatial resolution of NIR PL image (5μm). The analysis by transmission electron microscopy directly confirmed the existence of such <i>sp</i><sup>2</sup> clusters and the estimated size of the <i>sp</i><sup>2</sup> clusters was widely ranged from 0.5 to 4 nm. The effect of the GO reduction to the local structure of carbon <i>sp</i><sup>2</sup> clusters was also studied and it was found that the NIR PL intensity decreased as the reduction progressed and that there was no large spectral shift. [DOI: 10.1380/ejssnt.2012.513]
Other Link： https://ci.nii.ac.jp/naid/130004933754
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CW-photoacoustic-based protocol for the selective and non-invasive monitoring of aqueous glucose level
上野 祐子, 為近 恵美
応用物理学会学術講演会講演予稿集 2011.2 ( 0 ) 342 - 342 2011.8
Language：English Publishing type：Research paper (scientific journal) Publisher：公益社団法人 応用物理学会 Joint Work
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Quantitative Analysis of Amino Acids in Dietary Supplements Using Terahertz Time-domain Spectroscopy
Ueno Yuko, Ajito Katsuhiro, Kukutsu Naoya, Tamechika Emi
ANALYTICAL SCIENCES 27 ( 4 ) 351 - 356 2011.4
Language：English Publishing type：Research paper (scientific journal) Joint Work
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New OPBS protocol for selective, continuous, and non-invasive monitoring of blood glucose level based on the CW photoacoustic method
上野 祐子, 為近 恵美
応用物理学会学術講演会講演予稿集 2011.1 ( 0 ) 750 - 750 2011.3
Language：English Publishing type：Research paper (scientific journal) Publisher：公益社団法人 応用物理学会 Joint Work
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D-9-18 Analysis of user behavior in a field trail for "Ubiquitous" Healthcare System
Okabe Yuichi, Kiyokura Takanori, Iraha Asato, Toyama Hirotetsu, Yamakoshi Yasuhiro, Tamechika Emi
Proceedings of the IEICE General Conference 2011 ( 1 ) 2011.2
Language：English Publishing type：Research paper (scientific journal) Publisher：The Institute of Electronics, Information and Communication Engineers Joint Work
Other Link： https://ci.nii.ac.jp/naid/110008574178
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Terahertz Spectroscopic Imaging of Polymorphic Forms in Pharmaceutical Crystals
Ajito Katsuhiro, Ueno Yuko, Song Ho-Jin, Tamechika Emi, Kukutsu Naoya
MOLECULAR CRYSTALS AND LIQUID CRYSTALS 538 33 - 38 2011
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Terahertz Chemical Imaging of Molecular Networks for Pharmaceutical Applications
Ajito Katsuhiro, Ueno Yuko, Song Ho-Jin, Tamechika Emi, Kukutsu Naoya
BIOELECTRONICS, BIOINTERFACES, AND BIOMEDICAL APPLICATIONS 4 35 ( 7 ) 157 - 165 2011
Language：English Publishing type：Research paper (scientific journal) Joint Work
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New CW-Photoacoustic-based Protocol for Noninvasive and Selective Determination of Aqueous Glucose Level: a Potential Alternative towards Noninvasive Blood Sugar Sensing
Camou S., Ueno Y., Tamechika E.
2011 IEEE SENSORS 798 - 801 2011
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Validation of a “ubiquitous” Healthcare System in a Field Trial
OKABE Yuichi, TAMECHIKA Emi, FUKUDA Hiroshi, KIYOKURA Takanori, SHINDO Kazuhiko, YAMAGUCHI Hatsuyo, … Show more authors
OKABE Yuichi, TAMECHIKA Emi, FUKUDA Hiroshi, KIYOKURA Takanori, SHINDO Kazuhiko, YAMAGUCHI Hatsuyo, MIYAHIRA Mayumi, IRAHA Asato, TOYAMA Hironori, UENO Mutsuhir Hide authors
Transactions of Japanese Society for Medical and Biological Engineering 49 ( 1 ) 255 - 259 2011
Language：English Publishing type：Research paper (scientific journal) Publisher：Japanese Society for Medical and Biological Engineering Joint Work
We developed a “ubiquitous” healthcare system using active tag technologies. Our system does not require any kind of PC operation, and the workload borne by users is low. In addition, we developed a data browsing terminal (called the Kiosk terminal) for our system. The terminal also uses active tag technologies and does not require any keyboard or mouse operation to browse data. We are currently conducting a field trial of our system in Zamami village, Okinawa, supported by the Ministry of Internal Affairs and Communications. Unlike another system using USB data transmission technologies, our system can collect vital data without fail. Heavily used facilities can be revealed by analyzing the usage frequency of active tag data receivers, and such knowledge is important for optimizing the system. After the installation of Kiosk terminals, the average number of steps per day of Kiosk users, as recorded by their pedometers, increased by more than twice that before installation.
Other Link： https://ci.nii.ac.jp/naid/130004947432
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B-20-30 Signal-reception experiment by using wideband 429MHz active tag system on the field
Kiyokura Takanori, Okabe Yuichi, Fukuda Hiroshi, Shindo Kazuhiko, Tamechika Emi, Iraha Asato, Taira … Show more authors
Kiyokura Takanori, Okabe Yuichi, Fukuda Hiroshi, Shindo Kazuhiko, Tamechika Emi, Iraha Asato, Taira Toshimasa, Kuniyoshi Toru, Ueno Mutsuhiro Hide authors
Proceedings of the Society Conference of IEICE 2010 ( 2 ) 2010.8
Language：English Publishing type：Research paper (scientific journal) Publisher：The Institute of Electronics, Information and Communication Engineers Joint Work
Other Link： https://ci.nii.ac.jp/naid/110008139567
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B-20-14 Evaluation of Data Browsing Terminal for Ubiquitous Healthcare System
Okabe Yuichi, Fukuda Hiroshi, Kiyokura Takanori, Shindo Kazuhiko, Tamechika Emi, Yamaguchi Hatsuyo, … Show more authors
Okabe Yuichi, Fukuda Hiroshi, Kiyokura Takanori, Shindo Kazuhiko, Tamechika Emi, Yamaguchi Hatsuyo, Miyahira Mayumi, Iraha Asato, Toyama Hirotetsu, Ueno Mutsuhiro Hide authors
Proceedings of the Society Conference of IEICE 2010 ( 2 ) 2010.8
Language：English Publishing type：Research paper (scientific journal) Publisher：The Institute of Electronics, Information and Communication Engineers Joint Work
Other Link： https://ci.nii.ac.jp/naid/110008139551
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SPRセンサによる自己送液チップの流速評価
三浦 達, 堀内 勉, 高橋 淳一, 瀬山 倫子, 岩崎 弦, 為近 恵美
応用物理学会学術講演会講演予稿集 2010.2 ( 0 ) 2234 - 2234 2010.8
Language：Japanese Publishing type：Research paper (scientific journal) Publisher：公益社団法人 応用物理学会 Joint Work
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非侵襲連続モニタリング血糖値センサに向けCW光音響法により新しいコンセプト
田島 卓郎, 芳賀 恒之, 為近 恵美
応用物理学会学術講演会講演予稿集 2010.2 ( 0 ) 354 - 354 2010.8
Language：Japanese Publishing type：Research paper (scientific journal) Publisher：公益社団法人 応用物理学会 Joint Work
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Silicon wire waveguiding system: Fundamental characteristics and applications
Yamada K, Tsuchizawa T, Watanabe T, Takahashi J, Fukuda H, Takahashi M, Shoji T, Uchiyama S, Tamech … Show more authors
Yamada K, Tsuchizawa T, Watanabe T, Takahashi J, Fukuda H, Takahashi M, Shoji T, Uchiyama S, Tamechika E, Itabashi S, Morita H Hide authors
ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS 89 ( 3 ) 42 - 55 2006
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Silicon Wire Waveguiding System : Fundamental Characteristics and Applications
YAMADA Koji, TSUCHIZAWA Tai, WATANABE Toshifumi, TAKAHASHI Jun-ichi, FUKUDA Hiroshi, TAKAHASHI Mits … Show more authors
YAMADA Koji, TSUCHIZAWA Tai, WATANABE Toshifumi, TAKAHASHI Jun-ichi, FUKUDA Hiroshi, TAKAHASHI Mitsutoshi, SHOJI Tetsufumi, UCHIYAMA Shingo, TAMECHIKA Emi, ITABASHI Sei-ichi, MORITA Hirofumi Hide authors
The IEICE transactions on electronics C 88 ( 6 ) 374 - 387 2005.6
Language：English Publishing type：Research paper (scientific journal) Publisher：The Institute of Electronics, Information and Communication Engineers Joint Work
Other Link： https://ci.nii.ac.jp/naid/110003203646
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Microphotonics devices based on silicon microfabrication technology
Tsuchizawa T, Yamada K, Fukuda H, Watanabe T, Takahashi J, Takahashi M, Shoji T, Tamechika E, Itaba … Show more authors
Tsuchizawa T, Yamada K, Fukuda H, Watanabe T, Takahashi J, Takahashi M, Shoji T, Tamechika E, Itabashi S, Morita H Hide authors
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS 11 ( 1 ) 232 - 240 2005
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Microphotonics devices based on silicon wire waveguiding system
Yamada K, Tsuchizawa T, Watanabe T, Takahashi JI, Tamechika E, Takahashi M, Uchiyama S, Fukuda H, S … Show more authors
Yamada K, Tsuchizawa T, Watanabe T, Takahashi JI, Tamechika E, Takahashi M, Uchiyama S, Fukuda H, Shoji T, Itabashi SI, Morita H Hide authors
IEICE TRANSACTIONS ON ELECTRONICS E87C ( 3 ) 351 - 358 2004.3
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Reports on International Conferences
57 ( 6 ) 422 - 422 2002.6
Language：English Publishing type：Research paper (scientific journal) Publisher：The Physical Society of Japan (JPS) Joint Work
Other Link： https://ci.nii.ac.jp/naid/110006788098
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SOI-based photonic crystal line-defect waveguides
Yamada K, Notomi M, Shinya A, Yokohama I, Shoji T, Tsuchizawa T, Watanabe T, Takahashi J, Tamechika … Show more authors
Yamada K, Notomi M, Shinya A, Yokohama I, Shoji T, Tsuchizawa T, Watanabe T, Takahashi J, Tamechika E, Morita H Hide authors
ACTIVE AND PASSIVE OPTICAL COMPONENTS FOR WDM COMMUNICATIONS II 4870 324 - 338 2002
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Fabrication and evaluation of submicron-square Si wire waveguides with spot size converters
Tsuchizawa T, Watanabe T, Tamechika E, Shoji T, Yamada K, Takahashi J, Uchiyama S, Itabashi S, Mori … Show more authors
Tsuchizawa T, Watanabe T, Tamechika E, Shoji T, Yamada K, Takahashi J, Uchiyama S, Itabashi S, Morita H Hide authors
2002 IEEE/LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2 287 - 288 2002
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Survey of investigation on present status of JSAP members
OKU-WATANABE Miyoko, TAMECHIKA Emi, DOMEN Kay, OKADA Yoshiko
OYOBUTURI 71 ( 5 ) 510 - 520 2002
Language：English Publishing type：Research paper (scientific journal) Publisher：The Japan Society of Applied Physics Joint Work
Other Link： https://ci.nii.ac.jp/naid/130003594534
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Short Spot-Size-Converters Using BCB Cores for Efficient Fiber Coupling
ARATAKE Atsushi, TAMECHIKA Emi, SUGITANI Suehiro, ARAI Kunihiro
Extended abstracts of the ... Conference on Solid State Devices and Materials 1999 470 - 471 1999.9
Language：English Publishing type：Research paper (scientific journal) Joint Work
Other Link： https://ci.nii.ac.jp/naid/10022537209
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Automatic generation of phase-shifting mask patterns using shifter-edge lines
Tamechika E, Watanabe T, Komatsu K
MICROELECTRONIC ENGINEERING 42 103 - 106 1998.3
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Horiuchi Toshiyuki, Harada Katsuhiro, Matsuo Seitaro, Takeuchi Yoshinobu, Tamechika Emi, Mimura Yos … Show more authors
Horiuchi Toshiyuki, Harada Katsuhiro, Matsuo Seitaro, Takeuchi Yoshinobu, Tamechika Emi, Mimura Yoshiaki Hide authors
Japanese journal of applied physics. Pt. 1, Regular papers & short notes 34 ( 3 ) 1698 - 1708 1995.3
Language：English Publishing type：Research paper (scientific journal) Publisher：社団法人応用物理学会 Joint Work
This paper describes the resolution enhancement by oblique illumination optical lithography using a transmittance-adjusted pupil filter that has a conjugate shape to the secondary light source. The resolution enhancement depends on the amplitude transmittance distribution of the pupil filter in the lens aperture. Thus, the optimum transmittance distribution attaining the highest resolution at a practical depth of focus is investigated, and superior performance is verified experimentally using an actual i-line stepper, that is, the actual resolution improvement is comparable to the simulation results. Despite this improvement, two problems must be addressed. Pattern profiles degrade at the ends of periodical patterns, and the opaque pattern widths of middle-pitch patterns become a little narrow. These two problems are solved by optimizing the transmittance distribution of the filter such that there is no significant deterioration in the high-resolution performance.
Other Link： https://ci.nii.ac.jp/naid/110003904220
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Patterning Characteristics of Oblique Illumination Optical Lithography
Horiuchi Toshiyuki, Takeuchi Yoshinobu, Tamechika Emi, Mimura Yoshiaki, Matsuo Seitaro, Harada Kats … Show more authors
Horiuchi Toshiyuki, Takeuchi Yoshinobu, Tamechika Emi, Mimura Yoshiaki, Matsuo Seitaro, Harada Katsuhiro Hide authors
Jpn J Appl Phys 33 ( 5 ) 2779 - 2788 1994.5
Language：English Publishing type：Research paper (scientific journal) Publisher：社団法人応用物理学会 Joint Work
The patterning characteristics of oblique illumination lithography are investigated. When the reticle is illuminated obliquely, the pattern widths corresponding to the opaque parts of the reticle are apt to become thinner than those replicated by conventional optical lithography. This characteristic is verified by both analysis of the projected image intensity distribution and some patterning experiments. The double harmony of the periodical pattern image plays an important role in defining the pattern widths. We concluded that the lack of the double harmonic light waves caused the pattern shrinkage in the case of oblique illumination lithography. In recognizing the above differences, the exposure dose can be suitably controlled so as to attain high resolution and large focus latitude.
Other Link： https://ci.nii.ac.jp/naid/110003903302
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RESOLUTION IMPROVEMENT USING AUXILIARY PATTERN GROUPS IN OBLIQUE ILLUMINATION LITHOGRAPHY
TAMECHIKA E, HORIUCHI T, HARADA K
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 32 ( 12B ) 5856 - 5862 1993.12
Language：English Publishing type：Research paper (scientific journal) Joint Work
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Practical resolution improvement in oblique illumination lithography
Tamechika Emi, Horiuchi Toshiyuki, Harada Katsuhiro
Technical report of IEICE. SDM 93 ( 300 ) 1 - 8 1993.10
Language：English Publishing type：Research paper (scientific journal) Publisher：The Institute of Electronics, Information and Communication Engineers Joint Work
An oblique illumination can improve the resolution in optical lithography.This paper presents a resolution improvement technique for non-periodic patterns where the oblique illumination effects are limited.Since the problems are caused by non-periodicity,a technique called auxiliary pattern group(APG)is introduced to supplement the periodicity.The effects of the APG are shown in simulation,and parameter dependence is also discussed.Experimental results for oblique illumination with a t- z mask confirm that using APGs improves the resolution and focus latitude.
Other Link： https://ci.nii.ac.jp/naid/110003309902
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Takeuchi Yoshinobu, Tamechika Emi, Harada Katsuhiro, HARADA Katsuhiro
Jpn J Appl Phys 31 ( 12 ) 4120 - 4125 1992.12
Language：English Publishing type：Research paper (scientific journal) Publisher：社団法人応用物理学会 Joint Work
Annular illumination with a spatial filter, or SSBL (single-sideband optical lithography), has performance equivalent to phase shifting in optical column technology. This paper presents an analytical method for examining image deformation characteristics in optical projection systems including SSBL. We express image intensity as the sum of a symmetric and an antisymmetric component. Image deformation can be clearly observed by using the antisymmetric component. From the point of view of proximate interaction, we show that the real part of mutual intensity is useful in interpreting image deformations. Optical image deformations are unavoidable in the range of 0.2–0.3 $\mu$m at the KrF-line wavelength. We present a simplified correction method for mask data which reduces computational time.
Other Link： https://ci.nii.ac.jp/naid/110003901265
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KATO Reiko, SHINKAI Masahiko, TAKATA Osamu, TAMECHIKA Emi, YODA Mitsumasa
Journal of the Japan Society of Precision Engineering 57 ( 1 ) p58 - 61 1991.1
Language：Japanese Publishing type：Research paper (scientific journal) Publisher：The Japan Society for Precision Engineering Joint Work
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河合 正治, 佐藤 一雄, 河西 正隆, 高浜 逸郎, 野際 靖雄, 松永 銕造, 加藤 玲子, 新海 雅彦, 高田 修, 為近 恵美, 依田 光正, 内山 隆, 奥野 昭宏, 喜多村 直
精密工学会誌 57 ( 1 ) 58 - 69 1991
Language：English Publishing type：Research paper (scientific journal) Publisher：公益社団法人 精密工学会 Joint Work
Other Link： https://ci.nii.ac.jp/naid/130001361891