INOUE Fumihiro

Affiliation

Faculty of Engineering, Division of Systems Research

Job Title

Associate Professor

Research Fields, Keywords

Unit processes for 3D integration, advanced packaging

Web Site

https://inoue.ynu.ac.jp/en/

Related SDGs




ORCID  https://orcid.org/0000-0003-2292-846X

写真a

Degree 【 display / non-display

  • Doctor of Engineering - Kansai University

Campus Career 【 display / non-display

  • 2021.4
     
     

    Duty   Yokohama National UniversityFaculty of Engineering   Division of Systems Research   Associate Professor  

  • 2022.10
     
     

    Concurrently   Yokohama National UniversityInstitute of Advanced Sciences   Associate Professor  

External Career 【 display / non-display

  • 2011.3
    -
    2014.10

    imec  

  • 2013.4
    -
    2014.10

    Tohoku University   Special researcher of the Japan Society for the Promotion of Science  

  • 2014.10
    -
    2021.3

    imec   Researcher  

 

Papers 【 display / non-display

  • Origin of Voids at the SiO2/SiO2 and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance

    Nagano F., Inoue F., Phommahaxay A., Peng L., Chancerel F., Naser H., Beyer G., Uedono A., Beyne E. … Show more authors

    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY   12 ( 3 )   2023.3  [Reviewed]

    DOI Web of Science

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    Language:English   Publishing type:Research paper (scientific journal)   Joint Work  

  • Wafer Thinning for 3D Integration

    Inoue Fumihiro

    Journal of The Japan Institute of Electronics Packaging   26 ( 1 )   172 - 177   2023.1

    DOI CiNii Research

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Institute of Electronics Packaging   Single Work  

  • 三次元実装基礎講座(第2回)ウエハ薄化技術

    井上 史大

    エレクトロニクス実装学会誌 = Journal of the Japan Institute of Electronics Packaging   26 ( 1 )   172 - 177   2023.1

    CiNii Research

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:エレクトロニクス実装学会   Single Work  

  • Void Formation Mechanism Related to Particles During Wafer-to-Wafer Direct Bonding

    Nagano F., Iacovo S., Phommahaxay A., Inoue F., Chancerel F., Naser H., Beyer G., Beyne E., De Gend … Show more authors

    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY   11 ( 6 )   2022.6  [Reviewed]

    DOI Web of Science

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    Language:English   Publishing type:Research paper (scientific journal)   Joint Work  

  • Electrochemical deposition of indium from chloride bath for low-temperature microbump bonding

    Park Kimoon, Inoue Fumihiro, Derakhshandeh Jaber, Yoo Bongyoung

    JAPANESE JOURNAL OF APPLIED PHYSICS   61 ( 4 )   041003-1 - 041003-9   2022.4  [Reviewed]

    DOI Web of Science

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    Language:English   Publishing type:Research paper (scientific journal)   Joint Work  

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Review Papers 【 display / non-display

Awards 【 display / non-display

  • 横浜国立大学 令和4年度優秀研究者表彰 奨励賞

    2023.3   横浜国立大学  

    Individual or group name of awards:井上史大

  • 公益財団法人里見奨学会 里見賞 研究提案表彰

    2022.10   公益財団法人里見奨学会  

    Individual or group name of awards:井上史大

  • IEEE EPS Outstanding Young Engineer Award

    2022.6   IEEE Electronics Packaging Society  

    Individual or group name of awards:Fumihiro Inoue

  • 2021年度「貴金属に関わる研究助成金」 ゴールド賞

    2022.3   一般財団法人 田中貴金属記念財団   貴金属配線による裏面電源供給ネットワークの形成

    Individual or group name of awards:井上 史大

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    【受賞に関する記事・報道】 https://b2b-ch.infomart.co.jp/news/detail.page?IMNEWS4=3182473 https://www.excite.co.jp/news/article/Prtimes_2022-03-31-43319-7/ https://www.japanmetaldaily.com/articles/-/103957

  • 第36回「研究費の助成」

    2022.3   東京応化科学技術振興財団   「形態制御めっき技術を用いた低温Cu-SiCNハイブリッド接合技術の開発」

    Individual or group name of awards:井上史大

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Preferred joint research theme 【 display / non-display

  • 3D integration

  • Semiconductor manufacturing processes

  • Hybrid bonding

  • CMP

  • Electrochemical deposition

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Charge of on-campus class subject 【 display / non-display

  • 2023   Machine Design 2

    College of Engineering Science

  • 2023   Machine Design 1

    College of Engineering Science

  • 2023   Manufacturing of Processing Systems B

    Graduate school of Engineering Science

  • 2023   Manufacturing of Processing Systems A

    Graduate school of Engineering Science

  • 2023   Design of Processing Systems B

    Graduate school of Engineering Science

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