OHNO Shinya


Faculty of Engineering, Division of Intelligent Systems Engineering

Job Title

Associate Professor

Web Site


Graduating School 【 display / non-display


    Tokyo Institute of Technology   Faculty of Science   Physics Department   Graduated

Graduate School 【 display / non-display


    The University of Tokyo  Graduate School, Division of Science  Physics  Doctor Course 

External Career 【 display / non-display

  • 2003.04

    University of Pittsburgh (USA)   Research Associate  

Field of expertise (Grants-in-aid for Scientific Research classification) 【 display / non-display

  • Surface Physics

  • Optical Measurement

  • Thin film/Surface and interfacial physical properties


Research Career 【 display / non-display

  • Optical properties of semiconductor surfaces

    Project Year:  -   

Books 【 display / non-display

  • Frontiers in Optical Methods: Nano-Characterization and Coherent Control

    K, Shudo, I. Katayama, S. Ohno Eds. (Part: Joint Editor , Range: 主著者として論文執筆を担当 )

    Springer-Verlag, GmbH  2013.12

     View Summary


Thesis for a degree 【 display / non-display

  • Formation of nanoscale structure on nitrogen adsorbed Cu(001) surfaces

    大野 真也 


    Doctoral Thesis   Single Work

     View Summary

    東京大学大学院理学系研究科物理学専攻 窒素吸着した銅表面の構造、鉄蒸着により形成される構造、酸素曝露により形成される構造を走査トンネル顕微鏡(STM)を用いて調べた。ナノスケール構造の成長過程を原子レベルで解明した。特に、歪みとナノスケール構造の相関を原子レベルで明らかにした。具体的には、基板上の原子と蒸着原子間の原子交換、表面歪みと酸素分子の解離確率、拡散速度の相関を明らかにした。

Papers 【 display / non-display

  • Surface analysis and pumping speed measurements of oxygen-free palladium/titanium nonevaporable getter after heating at 100-450℃

    Tetsuya Miyazawa, Yuta Sugawara, Ichiro Yoshikawa, Yuta Sato, Shinya Ohno, Tomohiro Okada, Masuaki Matsumoto, Takashi Kikuchi, Kazuhiko Mase

    Journal of Vacuum Science & Technology B   37   062923(1 - 7)   2019.11  [Refereed]

    Joint Work

  • Development of a New Nonevaporable Getter Coating Using Oxygen-Free Palladium/Titanium, Surface Analysis by Synchrotron Radiation X-ray Photoelectron Spectroscopy, Residual Gas Analysis, and Evaluation of Pumping Speeds

    MIYAZAWA Tetsuya, KURIHARA Masashi, OHNO Shinya, HASHIMOTO Ayako, NAKAYAMA Yasuo, OZAWA Kenichi, KIKUCHI Takashi, MASE Kazuhiko

    Vacuum and Surface Science ( The Japan Society of Vacuum and Surface Science )  62 ( 9 )   568 - 573   2019.09  [Refereed]

    Joint Work

     View Summary

    <p>We have developed a novel nonevaporable getter named oxygen-free Pd/Ti. After activation at 133℃, oxygen-free Pd/Ti evacuates H<sub>2</sub> and CO. Its pumping speeds do not decrease even after repeated cycles of activation and exposure to the air. Surface analysis by synchrotron radiation X-ray photoelectron spectroscopy showed that the carbon contamination decreased to an extent on heating in UHV, but decreased considerably on heating under an O<sub>2</sub> pressure. The partial pressures of H<sub>2</sub>, CO, H<sub>2</sub>O, and CH<sub>4</sub> in an oxygen-free-Pd/Ti coated chamber reduced to some degree after baking in UHV, but reduced remarkably after baking under an O<sub>2</sub> pressure (O<sub>2</sub> baking). Catalytic chemical reactions which remove carbon and hydrogen adsorbed on Pd surfaces appear to be responsible for the reduction of the partial pressures of H<sub>2</sub>, CO, H<sub>2</sub>O, and CH<sub>4</sub>. The pumping speeds of the oxygen-free Pd/Ti coated chamber for H<sub>2</sub> and CO improved remarkably after O<sub>2</sub> baking.</p>

    DOI CiNii

  • XPS study on the thermal stability of oxygen-free Pd/Ti thin film, a new non-evaporable getter (NEG) coating

    Tetsuya Miyazawa, Masashi Kurihara, Shinya Ohno, Takashi Kikuchi, Kazuhiko Mase

    AIP Conference Proceedings   2054   060045(1-5)   2019.01  [Refereed]

    Joint Work


  • Oxygen-free palladium/titanium coating, a novel nonevaporable getter coating with an activation temperature of 133C


    Journal of Vacuum Science & Technology A ( American Vacuum Society )  36 ( 5 )   051601(1 - 8)   2018.08

    Joint Work


  • Non-Evaporable Getter (NEG) Coating Using Titanium and Palladium Vacuum Sublimation


    Vacuum and Surface Science ( The Japan Society of Vacuum and Surface Science )  61 ( 4 )   227 - 235   2018.04

    Joint Work

    DOI CiNii

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Review Papers 【 display / non-display

  • Reflectance Difference Spectroscopy

    Compendium of Surface and Interface Analysis (Springer-Verlag)     2018

    Introduction and explanation (commerce magazine)   Joint Work

  • Real-time analysis of initial oxidation process on Si(001) by means of surface differential reflectance spectroscopy and reflectance difference spectroscopy

    大野真也, 首藤健一, 田中正俊

    Frontiers in Optical Methods, Nano-Characterization and Coherent Control (Springer Series in Optical Sciences)   180   29 - 44   2014.01

    Introduction and explanation (bulletin of university, research institution)   Joint Work

  • Nanometer-scale structure formation on solid surfaces

    田中正俊, 首藤健一, 大野真也

    Nano- and Micromaterials (Springer Series in Advances in Materials Research)   9   19 - 95   2008.01

    Introduction and explanation (bulletin of university, research institution)   Joint Work

Presentations 【 display / non-display

  • Oxygen-Free Palladium/Titanium Coating, a Novel Non-Evaporable Getter Coating with an Activation Temperature of 133 °C

    Tetsuya Miyazawa, Masashi Kurihara, Shinya Ohno, Naoya Terashima, Yuto Natsui, Hiroo Kato, Yoshihiro Kato, Ayako Hashimoto, Takashi Kikuchi

    The Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2018),   (Waikoloa, USA)  2018.12.04  

  • XPS Study on the Thermal Stability of Oxygen-Free Pd/Ti Thin Film, a New Non-Evaporable Getter (NEG) Coating

    Tetsuya Miyazawa, Masashi Kurihara, Shinya Ohno, Misao Yamanaka, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase

    International Workshop on Trends in Advanced Spectroscopy in Materials Science (TASPEC),   (Higashi-Hiroshima, Japan)  2018.10.04  

  • Linear and non-linear optical spectroscopy of monolayer transition-metal dichalcogenides under a microscope

    11th International Symposium on Atomic Level Characterizations for New Materials and Devices '17  (Aqua Kauai Beach Resort, Kauai, Hawaii, USA)  2017.12  

  • The dielectric function of atomically thin MoS2, MoSe2, WS2, and WSe2 observed by linear and non-linear optical measurements

    5th Ito International Research Conference, RIKEN Centennial Anniversary & Surface and Interface Spectroscopy  (Hongo, Tokyo, Japan)  2017.11  

  • Dynamic behavior of CO on Si(001) studied with optical methods

    The 8th International Symposium on Surface Science  (Epochal Tsukuba, Tsukuba, Japan)  2017.10  

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